PZFlex for MEMS and Filter Design

MEMS and Filters

PZFlex provides users with a unique set of capabilities for simulating a range of MEMS Devices and RF filters such as PMUTs, CMUTs, Resonators, SAWs, BAWs, FBARs, and SMRs.

Traditionally too computationally intense for general FEA, PZFlex breaks this barrier and facilitates high-level, coupled design work that was previously impossible. Easily extract key industry metrics such as Electrical Impedance, Phase Shifts, S-Parameters, Bandwidth, Resonance Modes, and much more.

With fast and efficient up-front simulation, design engineers can slash prototype fabrication costs, expedite time to market, and reduce design risk.

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  • Coupled Circuits

    Coupled Circuits
    Include the effects of embedded circuitry on performance. Electrical components can be connected to drive or receive electrode configurations.

  • Arbitrary Electrodes

    Arbitrary Electrodes
    Define any number of electrodes with arbitrary shapes and drive signals. Utilise non-regular shapes to enhance performance and reduce parasitic resonances.

  • Advanced Piezoelectric Materials

    Advanced Piezoelectric Materials
    Define full mechanical, piezoelectric and dielectric tensors to represent your materials. Supports simple transposition of properties for arbitrary cuts and symmetries.

  • S-Parameters

    Directly extract S-parameters vs Frequency from electrical signal information. For an N-Port network, only N-simulations are required to fully capture metrics.

  • Material Characterization Tools

    Material Characterization Tools
    Utilise existing experimental data to run numerical optimisation to extract more precise, relevant material properties for accurate simulations.

  • Full 3D Models

    Full 3D Models
    Reduce approximation and fully explore your design space by modelling complete geometries. Import from CAD or other 3rd party tools to enhance workflow.

  • Full Electro-Mechanical Solution

    Full Electro-Mechanical Solution
    Coupled elasto-dynamic and piezoelectric effects to analyse large devices such as SAWs, BAWs, FBARs, SMRs and more.

  • Ultra-Fast Solvers

    Ultra-Fast Solvers
    Deliver results in a fraction of the time of other FEA codes to accelerate design cycles and slash cost-bases. Parallelise runs to achieve unmatched efficiencies.


PZFlex has been used to simulate Micromachined Ultrasonic Transducers for over 15 years. With the capability for large piezoelectric & electrostatic calculations, users can create and analyse 3D array structures to investigate Key Performance Metrics such as inter-element cross-talk, transmit-receive sensitivity, bandwidth and anything else captured during experimentation. Through PZFlex, engineers can drastically reduce the requirement for physical fabrications and drive down development costs.

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  • Piezoelectric Membranes

    Piezoelectric Membranes
    Generate membrane behaviour from thin piezoelectric materials excited by arbitrary voltages. Structures can include thin passive and active layers.

  • Acoustic-Structure Coupling

    Acoustic-Structure Coupling
    Automatic coupling of the structural mechanicals to fluid & solid loads enables users to easily explore the acoustic field properties of their devices.

  • Electrostatic Solver

    Electrostatic Solver
    Capture membrane deformation due to electric field strength with 3D electrostatic solvers. Changes in membrane position create corresponding changes in Electric Field Strength.

  • 3D Arrays

    3D Arrays
    With efficient solvers it is possible to simulate multi-element arrays in a single simulation to capture cross-talk effects on overall system performance.

  • Nonlinear Behavior

    Nonlinear Behavior
    Include nonlinear geometric effects as the membrane material stiffens with deformation, and nonlinear electrostatic fields as structure is updated during simulation.

  • Complex Transmission Loads

    Complex Transmission Loads
    Import realistic material maps into the simulation to represent multi-layered, or tissue-like load environments.

  • Transient Simulations

    Transient Simulations
    Entire system performance can be captured in a single time-domain simulation, providing unique insights into the complex coupled physics involved.

  • Contact Effects
    Contact Effects
    Collapse mode behaviour effects resonance and efficiency of CMUT sensors. Capture these effects in the design to optimise system performance.